| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a highly reliable image display device by suppressing the deterioration of the diode characteristics of an anodic oxide film constituting a thin-film electron source. <P>SOLUTION: A thin film electron source comprises an electron acceleration layer 12 that uses a signal wiring as a lower electrode 11 and comprising an anodic oxide film, formed by anodizing the surface of the signal wiring, and an upper electrode 13 laminated, while covering the electron acceleration layer to form an electron-emitting electrode, and the ratios of hydrous alumina components to the anhydrous alumina components contained in the anodic oxide film forming the electron accelerating layer 12 on the upper electrode side are made different from those on the lower electrode side; and an alumina film, located on the upper electrode side, contains more hydrous alumina components than those on the lower electrode side. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
