| 摘要 |
PROBLEM TO BE SOLVED: To provide a conveyor for a surface treatment device which can prevent a substrate material from hanging down, prevent its winding etc., and convey the substrate material with high accuracy while holding it with a proper holding pressure, thereby realizing stable conveying of the substrate material. SOLUTION: The surface treatment device 1 comprises a liquid tank 5 filled with a treatment liquid B, a conveyor 3 arranged in the liquid tank 5 for submerged transportation, and spray nozzles 4 arranged in the liquid tank 5 for submerged injection of the treatment liquid B. In the conveyor 3, pinch rollers 8, 9 for sending the substrate material A while holding both end faces E of the substrate material A are aligned. In the pinch rollers 8, 9, grooves 17, 19 are formed in the outer peripheries. In the lower pinch roller 9, a wire 18 is stretched between the grooves 17. In the upper pinch roller 8, a ring 20 is inserted and fitted into the grooves 19, and its roll pressure is adjusted based on the push-down force of an attached weight means 21. Thereby the upper pinch roller 8 is brought into pressure contact with the lower pinch roller 9. COPYRIGHT: (C)2008,JPO&INPIT
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