| 摘要 |
PROBLEM TO BE SOLVED: To provide a steam nozzle removing an object to be washed by centralizing steam on a treatment substrate after a steam eruption and utilizing the centralization of a thermal energy and hitting power. SOLUTION: The steam is dispersed on a dispersion board inside the nozzle and the dispersed steam is sprayed to a focusing point on the nozzle central axis at a tapered side wall by Coanda effect. The use of the focusing nozzle having this construction prevents a reduction in the temperature of a high-temperature fluid observed in a general circular nozzle to enable a spraying of the steam good in temperature efficiency on the treatment substrate. Further, the effective use of the thermal energy and the hitting power of the steam centralized by the focusing nozzle enables the cleaning of particles which have been difficult to remove, and the removal of a resist film or the like. COPYRIGHT: (C)2008,JPO&INPIT
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