发明名称 |
Apparatus for the thermal treatment of process exhaust gases containing pollutants |
摘要 |
The invention relates to an apparatus for the thermal treatment of process exhaust gases containing pollutants, which can be used for a very wide range of surface modification processes carried out under a vacuum. The intention is to achieve the object of thermally treating process exhaust gases containing pollutants in such a way that accumulations of particles on the inner wall of a combustion chamber and an undesirable adverse effect on the thermal conversion can be avoided with little outlay.
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申请公布号 |
US7377771(B2) |
申请公布日期 |
2008.05.27 |
申请号 |
US20040937526 |
申请日期 |
2004.09.09 |
申请人 |
DAS-DUNNSCHICHT ANLAGAN SYSTEME GMBH |
发明人 |
WIESENBERG WIDO;FRENZEL ANDREAS;GEHMLICH KONRAD;REICHARDT HORST;RITTER LOTHAR;KLOBETA CORINA;HENTRICH MICHAEL |
分类号 |
F23D14/58;F23G7/06;F23C5/32;F23D1/00;F23J15/04;F23Q9/00 |
主分类号 |
F23D14/58 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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