| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a radiation system having a foil trap arranged between a collector such as a vertical incidence collector and a (plasma) light source such that radiation from the light source passes the foil trap twice. <P>SOLUTION: Radiation passes a foil trap for the first time before it strikes against a collector, and passes the foil trap for the second time after it is reflected on the collector. This arrangement has been impossible so far. Since the foil trap has a thin plate which is parallel with both the radiation from a light source and the radiation reflected on the collector, the radiation is not interrupted by the foil trap. Consequently, the vertical incidence collector used together with a radiation source formed by plasma can be protected against fragments produced from an EUV source. <P>COPYRIGHT: (C)2008,JPO&INPIT |
