Method and equipment for manufacturing aluminum nitride bulk single crystal

摘要

The present invention provides a process for forming a bulk monocrystalline aluminum nitride by using a supercritical ammonia. The process comprises the steps of forming a supercritical solvent containing ions of an alkali metal in an autoclave; and dissolving a feedstock in this supercritical solvent to form a supercritical solution, and simultaneously or separately crystallizing aluminum nitride on the face of a crystallization seed. This process is carried out in the autoclave ( 1 ) which is provided with a convection-controller ( 2 ) arranged therein and which is to produce a supercritical solvent. The autoclave is set in a furnace unit ( 4 ) equipped with a heater ( 5 ) and/or a cooler ( 6 ).