| 摘要 |
PROBLEM TO BE SOLVED: To remove noise in a micro electromechanical system (MEMS) accelerometer device having a proof mass flexibly attached to a substrate. SOLUTION: The device includes one or more sense capacitors 26 formed between the proof mass and the substrate, one or more torque capacitors 24 formed between the proof mass and the substrate, and an isolation device that electrically isolates cathodes of the sense capacitors 26 from cathodes of the torque capacitors 24 on the proof mass. COPYRIGHT: (C)2008,JPO&INPIT
|
