| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an inspection device having a piezoelectric substrate exciting acoustic waves in a substrate by using a monolithic antenna excited acoustic transduction (MAEAT) device. <P>SOLUTION: The acoustic device is fabricated by photolithographically depositing a metallic exciting antenna on the piezoelectric substrate. The inspection device is constructed of the acoustic device, a variable frequency transmitter connected to the exciting antenna, a detection circuit, and a controller making the transmitter scanned over a frequency range including a natural frequency while monitoring parameters of the acoustic device. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
