| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent deterioration of the purity of the product gas when the product gas discharge amount increases rapidly, in a PSA separation method in which a rest process is arranged between an adsorption process and a pressure equalizing process and between a regeneration process and a pressure equalizing process in such a way that the time for the rest process is modified according to a decrease in the product gas discharging flow amount. <P>SOLUTION: A pressure recovering process of transferring a gas from an adsorption column on the higher-pressure side to another column on the lower-pressure side at the beginning of the rest process is provided. When the gas is transferred in the pressure recovering process, the transfer is preferably carried out through the line to be used in the regeneration process for the adsorption column. The pressure recovering process is preferably stopped when the pressure of the adsorption column on the lower-pressure side reaches a predetermined pressure or the time elapse of the pressure recovering process reaches a predetermined length during the pressure recovering process. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
