| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of sensitively detecting minute vibration in a wide band even when a measured vibrating body has low reflexibility or is a light absorbent material, and to provide a small and inexpensive sensitive minute vibrometer of a wide band. SOLUTION: An optical coupler where a metal thin film 1 is tightly formed on transparent dielectrics 2 is constituted so that incident measuring light generates metal interface optical mode on interface of metal thin film 1. The measured vibrating body 5 is arranged via a clearance layer 6. The measured vibrating body 5 is irradiated with intensified evanescent light of the metal interface optical mode generated on the interface on the clearance layer 6 side of the metal thin film 1, and the reflective detection light from the optical coupler of the incident measuring light having generated the metal intensified evanescent light is measured, thereby detecting the minute vibration of the measured vibrating body 5. COPYRIGHT: (C)2008,JPO&INPIT
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