| 摘要 |
PROBLEM TO BE SOLVED: To provide a triaxial acceleration sensor which is excellent in productivity and reliability, and which can be made thin-shaped. SOLUTION: The triaxial acceleration sensor comprises: a support part 51 which is mounted on and fixed to a substrate 40; a mass part 52 which is made up in the form of a rectangular frame for surrounding the support part 51; four hinges 53 which connect respective sides of the rectangle of the mass part 52 to the support part 51 so as to displace the mass part 52 freely; four fixed electrodes 541-544 which are mounted on the substrate 40 so as to face the outer surface of each side of the mass part 52; and a fixed electrode 42 which is disposed on the substrate so as to face the undersurface of the mass part 52. Each of the hinges 53 comprises: a first diaphragm 53a which is made parallel and opposite to the inner surface of the side of the mass part 52, extends along the direction of the side and has both ends being connected with the mass part 52; a second diaphragm 53b which is made parallel and opposite to the first diaphragm 53a and has both ends being connected with the support part 51; and a beam 53c for connecting respective centers of the diaphragms 53a, 53b. COPYRIGHT: (C)2008,JPO&INPIT
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