Kontaminations-Überwachungsvorrichtung, Kontaminations-Managementsystem und darauf bezogene Verfahren

摘要

A contamination control apparatus (100) comprises a cover (106) configured to enclose the joint portion and to provide an enclosed cavity between the cover and the joint portion; an inlet port connected to the cover and configured to supply a gas to the cavity; and an outlet port (110) connected to the cover and configured to exhaust the gas and a contaminant from the cavity. Independent claims are also included for: (A) a contamination management system for use with a joint portion that connects pipes, comprising control unit including a cover configured to enclose the joint portion and providing an enclosed cavity between the cover and the joint portion, an inlet port connected to the cover and configured to supply a gas to the cavity, and an outlet port connected to the cover and configured to exhaust the gas and a contaminant from the cavity through a discharging duct (50); sampling pipes connected to the outlet port and configured to sample the contaminant and connected to a connection pipe (114) connecting the outlet port and the discharging duct; and an analyzing unit connected to the sampling pipes configured to analyze the sampled contaminant; (B) a method for reducing contamination in a clean room, comprising enclosing a joint portion connecting at least two pipes with a cover that defines an enclosed cavity, where a contaminant from the joint portion is contained in the cavity; supplying a gas to the cavity through an inlet port; exhausting a gas mixture of the gas and the contaminant from the cavity through an outlet port; and (C) a contamination control system comprising two pipes connected by a joint portion and configured to allow a processing fluid to flow; a cover configured to enclose the joint portion and to provide an enclosed cavity between the cover and the joint portion; an inlet port connected to the cover and configured to supply a gas to the cavity; and an outlet port connected to the cover and configured to exhaust the gas and a contaminant from the cavity.