METHOD FOR PATTERN INSPECTION,申请号KR20047020197-传众专利搜索

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发明名称	METHOD FOR PATTERN INSPECTION
摘要
申请公布号	KR100808652(B1)	申请公布日期	2008.02.29
申请号	KR20047020197	申请日期	2003.06.10
申请人		发明人
分类号	G01N21/956;G06T1/00;G06T7/00;H01L21/66	主分类号	G01N21/956
代理机构		代理人
主权项
地址

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