发明名称 RADIATION DETECTOR AND RADIATION ANALYZER
摘要 PROBLEM TO BE SOLVED: To increase a quantity of detected radiation reaching a radiation detector in comparison with a conventional constitution. SOLUTION: A radiation analyzer is provided with: the radiation detector 1 for detecting the radiation; optical members 11, 12 having a transmitting function for transmitting the radiation to a radiation guide system into which the detected radiation enters; and a capillary 7 having a focusing function for focusing the radiation entering from the entrance side on the nearest region relative to the radiation guide system on the entrance side. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008039500(A) 申请公布日期 2008.02.21
申请号 JP20060211681 申请日期 2006.08.03
申请人 SII NANOTECHNOLOGY INC 发明人 ODAWARA NARIKAZU;TANAKA KEIICHI
分类号 G01T1/26;G01N23/223;G01N23/225;G01T1/24;G01T7/00;G21K1/02;G21K1/06;H01L39/04 主分类号 G01T1/26
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