摘要 |
A method for fabricating an organic electro-luminescence display device is provided to form polycrystalline silicon having excellent characteristics without a complex process or reducing a manufacturing yield. A method for fabricating an organic electro-luminescence display device comprises the steps of: preparing a substrate including a pixel region and a driving region; forming an amorphous silicon layer on the substrate; crystallizing the amorphous silicon layer part on the pixel region and the driving region by using a first ELA(Excimer Laser Annealing) crystallization; and re-crystallizing the amorphous silicon layer part on the driving region by using the first ELA crystallization and a second ELA crystallization. The second crystallization is a crystallizing method using a layer beam having different energy densities. |