发明名称 FABRICATION METHOD OF ORGANIC ELECTROLUMINESCENCE DISPLAY DEVICE
摘要 A method for fabricating an organic electro-luminescence display device is provided to form polycrystalline silicon having excellent characteristics without a complex process or reducing a manufacturing yield. A method for fabricating an organic electro-luminescence display device comprises the steps of: preparing a substrate including a pixel region and a driving region; forming an amorphous silicon layer on the substrate; crystallizing the amorphous silicon layer part on the pixel region and the driving region by using a first ELA(Excimer Laser Annealing) crystallization; and re-crystallizing the amorphous silicon layer part on the driving region by using the first ELA crystallization and a second ELA crystallization. The second crystallization is a crystallizing method using a layer beam having different energy densities.
申请公布号 KR20080014499(A) 申请公布日期 2008.02.14
申请号 KR20060076298 申请日期 2006.08.11
申请人 SAMSUNG SDI CO., LTD. 发明人 CHUNG, SUNG WON
分类号 H05B33/04;H05B33/00;H05B33/10 主分类号 H05B33/04
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