| 摘要 |
The present invention provides a table for use in a plasma processing system that makes it possible to obtain a substrate processed with plasma, improved in within-substrate uniformity, and a plasma processing system comprising such a table. A table 2 for use in a plasma processing system 1 comprises an electrically conductive member serving as a lower electrode 21 for plasma formation, a lower dielectric layer 22 (first dielectric layer) formed on the electrically conductive member so that it covers the center of the upper surface of the electrically conductive member, serving to make a high-frequency electric field to be applied to plasma via a substrate uniform, and an upper dielectric layer 24 (second dielectric layer) having a relative dielectric constant of 100 or more, formed on the electrically conductive member so that it is in contact at least with the edge of the substrate, in order to prevent a high-frequency current that has propagated along the electrically conductive member face from leaking to the outside of the substrate (wafer W).
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