MAGNETRONSPUTTERVORRICHTUNG IN FORM EINES BLECHES,申请号DE19986038937-传众专利搜索

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发明名称	MAGNETRONSPUTTERVORRICHTUNG IN FORM EINES BLECHES
摘要
申请公布号	DE69838937(D1)	申请公布日期	2008.02.14
申请号	DE19986038937	申请日期	1998.07.17
申请人	SHIBAURA MECHATRONICS CORP.	发明人	IKEDA, JIRO;KINOKIRI, KYOJI
分类号	C23C14/56;C23C14/04;C23C14/34;C23C14/35;C23C14/50;G11B5/85;G11B5/851;G11B7/26;H01J37/34	主分类号	C23C14/56
代理机构		代理人
主权项
地址

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