| 摘要 |
PROBLEM TO BE SOLVED: To improve the recovery rate of a solvent and to reduce damages on a drying object due to overdrying. SOLUTION: The drying apparatus with a recovery function, which has a drying work control means 10a for controlling drying work to a drying object inside a treatment tub 2 and recovers the vaporized solvent corresponding to the drying of the drying object by the control of the drying work control means 10a, comprises: a drying end concentration information storage means 11a for storing drying end concentration information indicating the drying end concentration of the vaporized solvent when the drying of the drying object is ended; a vaporized solvent concentration detection means 8 for detecting the vaporized solvent concentration of the vaporized solvent; and a drying end judgement means 10b for comparing the detected vaporized solvent concentration and the drying end concentration information stored by the drying end concentration information storage means 11a and judging the end of the drying of the drying object. The drying work control means 10a is a means for ending the drying work of the drying object inside the treatment tub corresponding to the judgement that the drying is ended by the drying end judgement means 10b. COPYRIGHT: (C)2008,JPO&INPIT
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