| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a crucible protective sheet which improves workability by preventing damage and inclination of an internal crucible and can prevent SiC formation and thickness reduction of an external crucible by maintaining gas shielding even if compressibility is high. <P>SOLUTION: The crucible 1 comprises an internal crucible 2, an external crucible 3, and a sheet 4 composed of exfoliated graphite which is disposed between the crucibles 2 and 3. The sheet has gas permeability of less than 1.0×10<SP>-4</SP>cm<SP>2</SP>/s and compressibility of 20% or more when compressed with pressure of 34.3 MPa in the thickness direction. <P>COPYRIGHT: (C)2008,JPO&INPIT |
