发明名称 Method for Producing Electronic Device and Electronic Device
摘要 Upon fixing fine particulate active element members AE 1 to AE 3, which are carbon nanotube, rod-shaped semiconductor crystal, or the like, in an electronic device at predetermined positions thereof respectively, a method for producing an electronic device includes: dispersing the fine particulate active element members in a dielectric liquid 12 and filling the liquid in a space between a process-objective substrate 20 and a mask 1 which is placed opposite to the substrate and which has predetermined pattern electrodes P 1 C, P 1 L, P 1 R formed therein; and applying a predetermined voltage to the predetermined electrodes to concentrate the fine particulate active element members at positions which correspond to positions of the pattern electrodes, respectively. In this state, a light is irradiated to the substrate and the fine particulate active element members in the liquid so as to fix the fine particulate active element members to the substrate by a photochemical reaction. Thus, a high-performance electronic device using carbon nanotubes or rod-shaped semiconductor crystal can be manufactured at low cost.
申请公布号 US2008014675(A1) 申请公布日期 2008.01.17
申请号 US20050628053 申请日期 2005.05.31
申请人 NIKON CORPORATION 发明人 KAMEYAMA MASAOMI;KANEKO NORIO;TAKI YUSUKE
分类号 H01L21/64;H01L21/336;H01L29/06;H01L29/786;H01L51/00 主分类号 H01L21/64
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