MIRROR AND LITHOGRAPHIC APPARATUS WITH MIRROR,申请号KR20040052851-传众专利搜索

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发明名称	MIRROR AND LITHOGRAPHIC APPARATUS WITH MIRROR
摘要
申请公布号	KR100795139(B1)	申请公布日期	2008.01.17
申请号	KR20040052851	申请日期	2004.07.08
申请人		发明人
分类号	G03F7/20;G02B5/09;G02B5/18;G21K1/06;H01L21/027;(IPC1-7):G03F7/20	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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