METHOD FOR RECYCLING CRYSTAL SENSOR OF EVAPORATION APPARATUS

摘要

A method for recycling a crystal sensor of an evaporation device is provided to reduce a manufacturing cost by removing a thin film accumulated in a contact electrode using etch liquid. A crystal sensor(52a) of an evaporation device to monitor deposition materials deposited on a substrate for a time is collected. Cleaning on the crystal sensor is executed by using wet etchant(501). The cleaned crystal sensor is dried. The cleaning is executed by using ultrasonic. The dry is executed between 80 to 500 degrees centigrade. The deposition materials deposited on the substrate are organic materials. The cleaning is executed by using organic solvent.