| 摘要 |
An acceleration sensor made available without using a high-level semiconductor technology or a micro-machining technology. The sensor detects an acceleration with a high precision, yet the manufacturing cost is inexpensive. In the sensor, a silicon substrate (1) is used only for a portion with which a strain is caused by an acceleration, while an auxiliary substrate (4A,4B), a cap (8A,8B) and a mass substance (6A,6B) are formed of glass material. Joining of the silicon substrate (1) to the mass substance (6A,6B) and the auxiliary substrate (4A,4B), and the auxiliary substrate (4A,4B) to the cap (8A,8B) are made by direct bonding. <IMAGE> |
