Lanthanide oxide / hafnium oxide dielectric layers

摘要

Dielectric layers containing a hafnium oxide hafnium oxide layer arranged as one or more monolayers and a lanthanide oxide layer and a method of fabricating such a dielectric layer produce a reliable dielectric layer having an equivalent oxide thickness thinner than attainable using SiO₂. The dielectric can be formed as a nanolaminate of hafnium oxide and a lanthanide oxide.