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发明名称
BELLOWS-SUPPORTING STRUCTURE AND MOVABLE STAGE DEVICE
摘要
申请公布号
KR100787399(B1)
申请公布日期
2007.12.21
申请号
KR20067001166
申请日期
2006.01.18
申请人
发明人
分类号
B65G49/07;H01L21/02;F16J3/04;H01L21/677
主分类号
B65G49/07
代理机构
代理人
主权项
地址
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