| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a glass substrate for magnetic disk in which grinding that uses abrasive grain having the possibility of producing the limit of smoothing at the final stage of manufacturing is not performed. SOLUTION: The method of manufacturing the glass substrate for the magnetic disk has a circular glass plate ground and the main surface of the circular glass substrate for which grinding is finished irradiated with a gas cluster ion beam. In the method of manufacturing the glass substrate for the magnetic disk, gases of SF<SB>6</SB>, Ar, O<SB>2</SB>, NF<SB>3</SB>, N<SB>2</SB>O, CHF<SB>4</SB>, C<SB>2</SB>F<SB>6</SB>, C<SB>3</SB>F<SB>8</SB>, SiF<SB>4</SB>or COF<SB>2</SB>are used individually or in a mixed state, as source gas for the gas cluster ion beam. COPYRIGHT: (C)2008,JPO&INPIT
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