发明名称 METHOD FOR FABRICATING CHIP PACKAGE
摘要 The present invention provides a method for fabricating chip package comprises the following steps: forming a photoresist layer on a metal layer over a passivation layer, an opening in the photoresist layer exposing the metal layer, wherein said forming the photoresist layer comprises exposing the photoresist layer using 1X stepper with at least two of G-line, H-line and I-line; electroplating a gold layer over the metal layer exposed by the opening with an electroplating solution containing gold and sulfite ion; removing the photoresist layer and the metal layer not under the gold layer.
申请公布号 US2007275503(A1) 申请公布日期 2007.11.29
申请号 US20070750332 申请日期 2007.05.17
申请人 MEGICA CORPORATION 发明人 LIN MOU-SHIUNG;LEE JIN-YUAN
分类号 H01L21/00;H01L21/44 主分类号 H01L21/00
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