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发明名称
TREATMENT OF POLYSILAZANE WASTE
摘要
<p>The present invention provides for a method for treating polysilazane waste material.</p>
申请公布号
WO2007135556(A1)
申请公布日期
2007.11.29
申请号
WO2007IB01347
申请日期
2007.05.15
申请人
AZ ELECTRONIC MATERIALS USA CORP.
发明人
GURMAN, JOSHUA;OBERLANDER, JOSEPH, E.
分类号
C08J11/22
主分类号
C08J11/22
代理机构
代理人
主权项
地址
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