发明名称 INSPECTION MAP GENERATING DEVICE AND VISUAL INSPECTION DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an inspection map generating device capable of editing maps efficiently, and to provide a visual inspection device. SOLUTION: A controller 6 generates a map indicating positional relation of a plurality of domains on a test object, for which a predefined pattern is formed, according to predetermined conditions. A displaying section 8 displays the map. An imagery processing section 2 processes imagery data generated by imaging of the test object to determine whether a domain on the test object exists corresponding to the domain on the map. The controller 6 edits the map based on the results of determination by the imagery processing section 2. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007304036(A) 申请公布日期 2007.11.22
申请号 JP20060134786 申请日期 2006.05.15
申请人 OLYMPUS CORP 发明人 OI KIMIE
分类号 G01N21/956;H01L21/66 主分类号 G01N21/956
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