| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface shape measuring device and a surface shape measuring method, capable of three-dimensional shape measurements of not only a transparent but also an opaque inspection object. <P>SOLUTION: In the surface shape measuring device and the surface shape measuring method, an original image and a diffraction image can be acquired very efficiently by arranging a coherent light irradiation element, a non-coherent light irradiation element and a light distribution element on the upper parts of the inspection object between an imaging element and the inspection object, and not only two-dimensional but also three-dimensional measurements are made possible by using phase recovery method. <P>COPYRIGHT: (C)2008,JPO&INPIT |
