| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a discharge treatment device capable of effectively performing cooling of electrodes. <P>SOLUTION: At least one of the electrodes is provided with (1) at least an electrode body including a peripheral wall 12 having an outer periphery face to be a discharging face and side walls 28, 38 each continuing from either end of the peripheral wall 12 with a hollow space formed inside, (2) inside members 50, 52, 54 arranged inside the hollow space of the electrode body and forming sealed spaces 51, 53, 55 between the peripheral wall 12 and the side walls 28, 38 of the electrode body, and (3) first coolant channels 42, 37, 32, 34 each communicated with two side wall sides 53, 55 of the sealed spaces, respectively, and second coolant channels 44, 26. <P>COPYRIGHT: (C)2008,JPO&INPIT |
