ZINC OXIDE-BASED TRANSPARENT CONDUCTIVE FILM AND ITS PATTERNING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a zinc oxide-based transparent conductive film and its patterning method whereby patterning characteristics can be improved by adjusting the etching rate of the zinc oxide-based transparent conductive film. SOLUTION: This zinc oxide-based transparent conductive film has zinc oxide as a main component, and contains both elements of silicon (Si) and germanium (Ge) or both elements of titanium (Ti) and zirconium (Zr). When patterning the zinc oxide-based transparent conductive film by etching, the zinc oxide-based transparent conductive film is treated with water before the etching process. COPYRIGHT: (C)2008,JPO&INPIT