| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate transfer vessel in which gas filling its space can be uniformly and efficiently replaced, and to provide a method for replacing gas filling the space of the substrate transfer vessel uniformly and efficiently. SOLUTION: The substrate transfer vessel is equipped with a vessel body 1, which is provided with a substrate supporting means 4 that is provided with an opening 3 at its one side and capable of housing two or more substrates separately, and a lid 2 which is fixed to the vessel body 1 to close the opening 3 in a freely openable manner. A gas inlet 11 for introducing inert gas from outside of the vessel, a gas supply nozzle which is provided so as to jet out the inert gas introduced through the gas inlet 11 into spaces among the substrates housed in the vessel, and a gas outlet 12 for discharging the gas filling the vessel outside of it are provided to the lid 2. COPYRIGHT: (C)2008,JPO&INPIT |
