摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator that can change the shape and direction of oscillation trajectory of a contact arbitrarily. <P>SOLUTION: The piezoelectric actuator 1 has an oscillation body 10 structured with piezoelectric elements that oscillate by the combination of two oscillation modes of vertical oscillation and bending oscillation. This oscillation body 10 is provided with a first drive electrode 11 for supplying a first drive signal that excites the vertical oscillation, and second and third drive electrodes 12, 13 for supplying second and third drive signals that excite the bending oscillation. A phase adjustment means 33 is also provided that adjusts the phase of the second drive signal arbitrarily. <P>COPYRIGHT: (C)2008,JPO&INPIT |