A STRETCHABLE FORM OF SINGLE CRYSTAL SILICON FOR HIGH PERFORMANCE ELECTRONICS ON RUBBER SUBSTRATES

摘要

A stretchable form of single crystal silicon for high performance electronics on rubber substrates is provided to enable various deformations such as stretching, crimping, and bending. A stretchable form of single crystal silicon for high performance electronics on rubber substrates includes a flexible substrate(705), and a bent semiconductor structure(715). The flexible substrate(705) is formed of a polymer and/or elastic material substrate having a support surface(710). The bent semiconductor structure(715) has a curved inner surface(720). At least a portion of the curved inner surface(720) of the bent semiconductor structure(715) is adhered to the support surface of the flexible substrate(705). The curved inner surface(705) can be adhered to the support surface(710) at the entire points along the inner surface(720).