发明名称 Semiconductor device with high-k gate dielectric and quasi-metal gate, and method of forming thereof
摘要 A process and apparatus for a semiconductor device is provided. A device comprises a first transistor having a first charge carrier type. The first transistor comprises a high-k gate dielectric and a first doped electrode. The first charge carrier type comprises one of p-type and n-type and the first doped electrode comprises the other of p-type and n-type. The device further comprises a second transistor having a charge carrier type opposite the first charge carrier type. The second transistor comprises the high-k gate dielectric, and a second doped electrode, wherein the second doped electrode comprises the other of p-type and n-type.
申请公布号 US7279756(B2) 申请公布日期 2007.10.09
申请号 US20050185443 申请日期 2005.07.20
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 WANG CHIH-HAO;TSAI CHING-WEI;HU CHENMING
分类号 H01L27/08 主分类号 H01L27/08
代理机构 代理人
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