Dry cleaning module for large-substrate and cleaning apparatus and method to use the cleaning module,申请号KR20060018441-传众专利搜索

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发明名称	Dry cleaning module for large-substrate and cleaning apparatus and method to use the cleaning module
摘要
申请公布号	KR100764036(B1)	申请公布日期	2007.10.05
申请号	KR20060018441	申请日期	2006.02.24
申请人		发明人
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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