| 摘要 |
PROBLEM TO BE SOLVED: To effectively suppress bubbling in a treatment liquid in a recovery tank. SOLUTION: A cleaning section has a tank 12 for storage that stores a used cleaning liquid recovered from a treatment tank through a recovery pipe 18. The tank 12 has a liquid reception member 30 and a liquid guidance member 34. The liquid reception member 30 is at a sharp angle to a horizontal surface and has a slope section 32 for allowing the cleaning liquid recovered through the recovery pipe 18 to flow down and merging it to a liquid well P. The liquid guidance member 34 is arranged opposite to a tip 32a in the slope section 32 and has a guidance surface 34a recessed and curved on a perpendicular surface to the tip 32a. COPYRIGHT: (C)2008,JPO&INPIT
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