| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a product with inorganic antireflection layer in which an inorganic antireflection layer is hardly peeled off from a base material, and to provide a manufacturing method of the product with inorganic antireflection layer. <P>SOLUTION: The product with inorganic antireflection layer 10, 10', 10'' includes the base material 1, polysiloxane layer 2, 2', 2'' which is formed on the base material 1 and has a thickness of 1 to 50 nm, and an inorganic antireflection layer 3 formed on the polysiloxane layers 2, 2', 2''. The manufacturing method of the product with inorganic antireflection layer 10, 10', 10'' comprises: a polysiloxane layer forming process of forming polysiloxane layers 2, 2', 2'' by depositing a silane coupling agent on the base material 1; and an inorganic antireflection layer forming process of forming an inorganic antireflection layer 3 by the deposition onto the polysiloxane layers 2, 2', 2''. <P>COPYRIGHT: (C)2008,JPO&INPIT |
