| 摘要 |
PROBLEM TO BE SOLVED: To provide a model forming apparatus capable of forming a model used for analyzing abnormalities of an object by executing analyzing processing with proper combinations in executing the analyzing processing using combinations of a plurality of analyzing techniques. SOLUTION: The apparatus is provided with an analyzing procedure data storage section 33 for storing an execution order of a plurality of kinds of analyzing processings for analyzing process feature amount and inspection results; and an analyzing section 32 for successively executing different analyzing processings for the acquired process feature amount and the inspection results in accordance with the execution order stored in the procedure storage section, thereby generating a model of the correlation between the process feature amount and the inspection results. COPYRIGHT: (C)2007,JPO&INPIT
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