| 摘要 |
PROBLEM TO BE SOLVED: To provide a horizontal thermal treatment apparatus which can stop the leakage of a decomposition gas produced in a thermal treatment chamber into outer air, can easily maintain temperature in the thermal treatment chamber and can reduce the quantity of a gas necessary for combustion treatment. SOLUTION: This horizontal thermal treatment apparatus for continuously thermally treating an article to be treated is characterized by having a thermal treatment chamber, a seal chamber, a buffer chamber, and an air curtain means; the thermal treatment chamber has the first entrance and the first exit; the seal chamber has the second entrance, the second exit, and an exhaust port, and is disposed on the outside of the thermal treatment chamber; the buffer chamber has the third entrance and the third exit, and is disposed on the outside of the seal chamber; the air curtain means has blowout ports facing each other in the vertical direction to collide gases blown out from the mutually facing blowout ports with each other on the outsides of the third entrance and the third exit. COPYRIGHT: (C)2007,JPO&INPIT
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