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发明名称
Verfahren zum Zerteilen von Halbleiter-Wafern und Verfahren zum Herstellen von Halbleiterbauelementen
摘要
申请公布号
DE112005002441(T5)
申请公布日期
2007.09.06
申请号
DE200511002441
申请日期
2005.10.04
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO. LTD.
发明人
HAJI, HIROSHI;ARITA, KIYOSHI;NAKAGAWA, AKIRA;NODA, KAZUHIRO
分类号
H01L21/78
主分类号
H01L21/78
代理机构
代理人
主权项
地址
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