发明名称 |
HALBLEITERSCHEIBENGROSSE INTEGRIERTE OPTISCHE ELEMENTE |
摘要 |
<p>A method of making optical elements on a wafer level comprising: - making a master including an array of optical elements; - embossing a replica of said array of optical elements by applying said master to an embossable material; and - dicing said replica to form individual optical elements.</p> |
申请公布号 |
AT366998(T) |
申请公布日期 |
2007.08.15 |
申请号 |
AT19980949707T |
申请日期 |
1998.10.02 |
申请人 |
DIGITAL OPTICS CORPORATION |
发明人 |
HARDEN, BRIAN;KATHMAN, ALAN;FELDMAN, MICHAEL R. |
分类号 |
H01L25/16;G02B6/12;G02B6/42;G03F9/00;G11B7/12;G11B7/135;G11B7/22;H01L27/00;H01L27/146;H01L31/12;H01S3/00;H01S5/00;H01S5/022 |
主分类号 |
H01L25/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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