| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor inspection device capable of reducing manufacturing cost of a semiconductor device by reducing man-hours necessary for switching a handler. SOLUTION: The device includes a plurality of handlers 140, 150 connected by a tester body 110 and a cable 120, and connectable to a test head 130; and a handler moving part 160 capable of moving each handler 140, 150 between a connection position CP connected to the test head 130 and a waiting position WP separated from the connection position CP. The device is constituted so that one of the plurality of handlers 140, 150 is connected selectively to the test head 130 at the connection position CP. COPYRIGHT: (C)2007,JPO&INPIT
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