LASER BEAM INSIDE-SCRIBING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a laser beam inside-scribing method capable of easily dividing a work by condensing laser beams inside the light-transmittable work such as a silicon substrate and a glass substrate.

SOLUTION: The condensing point 50 of laser beams LB consisting of Nd:YAG laser third harmonic transmitted through a condensing lens L having at least the numerical aperture of≥0.13 is focused inside a quartz glass substrate 1, and the quartz glass substrate is irradiated with the laser beams LB. The quartz glass substrate 1 is relatively moved with respect to the laser beams LB along the division scheduled line to form reformed areas 51 caused by the many-photon absorption in a juxtaposed manner inside the quartz glass substrate 1.

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