| 摘要 |
A calibration method of a semiconductor device test apparatus is provided to secure survey delay by reflecting easily the database of real reciprocation delays in a process for forming a test pattern generating program and to remove easily the difference of phase by using a calibration board. One selected from a group consisting of a plurality of drive channel is connected with a plurality of output channels by using a first calibration board. At this time, output signals(IO_CP) of the plurality of output channels are aligned on the basis of a drive signal(DR) of the selected drive channel. The drive channels are connected with the output channels by using a second calibration board, respectively. At this time, drive signals of the drive channels are aligned on the basis of the aligned output signals. A plurality of input signals are aligned on the basis of the aligned output signals by using a DUT(Device Under Test) interface board capable of connecting a plurality of input channels with the output channels.
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