| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an ultrasonic vibrator which can easily connect lead wires even if a piezoelectric element is divided to avoid bad influence on a longitudinal vibration due to overlap lateral vibration over the longitudinal vibration, and manufacture a highly reliable ultrasonic vibrator; and also to provide an ultrasonic vibrator manufactured by this method. SOLUTION: The ultrasonic vibrator is manufactured by a step of forming first dicing grooves on an acoustically matched layer and a piezoelectric element plate joined, and dividing them into a plurality of piezoelectric elements; a process of joining the individual divided piezoelectric elements to substrates; a process of coating the surface near the joined portions of the piezoelectric elements and substrates joined, with a conductive film; and a process of forming second dicing grooves between the first dicing groove and the first dicing groove, in the piezoelectric element and the substrate coated with the conductive film, and in the acoustically matched layer, thereby forming a plurality of vibrator elements. COPYRIGHT: (C)2007,JPO&INPIT
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