| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of evaluating quantitatively a surface property such as cleanness and quality of a work surface evaluated conventionally by visual appearance inspection. SOLUTION: A reference pattern 14 arranged with a ring pattern around an objective lens of an imaging device 12 as the center is faced each other to the work surface, by pushing a tip of a probe 10 against the work surface, using the probe 10 provided in a vertical-directional intermediate of a cylindrical case 11, the reference pattern 14 is illuminated by a light from a light source to reflect a reflection image of the reference pattern 14 on the work surface, the reflection image is picked up by the imaging device, a standard deviation of amplitudes in a brightness distribution of an image data is found on a plurality of lines extended radially from the center of the ring pattern in an obtained image, and the image clarity of the work surface is evaluated based on specular rates about the plurality of lines, using a relative value of the obtained standard deviation to a standard deviation of amplitudes in a brightness distribution of an image data on a plurality of lines as to a reference specular face, as the specular rate. COPYRIGHT: (C)2007,JPO&INPIT
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