| 摘要 |
PROBLEM TO BE SOLVED: To provide an echelle-type ICP emission spectrophotometer capable of performing emission spectrum analysis with good reproducibility by reducing the influence of a gap of spectrum images on a two-dimensional detection plane of a detector resulting from a temperature change and the like. SOLUTION: At the time of background measurement, an Ar identification processing part 22 captures the spectrum images by emission of argon which is normally supplied to a plasma torch 2, and stores pixel location and intensity information based on the spectrum images in a reference information storage part 23. The Ar identification processing part 22 captures the spectrum images by emission of argon on the detection plane of the detector 14 also during sample measurement. An image formation gap calculation part 24 calculates the size and direction of the location gap from the information stored in the reference information storage part 23 and the current information on the spectrum images, drives the piezoelectric actuators 34, 36 through a drive control part 19, and fine-tunes the angle of a telemeter mirror 13. COPYRIGHT: (C)2007,JPO&INPIT
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