| 摘要 |
PROBLEM TO BE SOLVED: To provide a density unevenness testing apparatus, capable of testing minute fluctuations in density of a periodic pattern which is formed on a substrate having a uniform density. SOLUTION: The apparatus for testing density unevenness in the pattern formed on the substrate comprises at least a first testing means 10 comprising a first photographic means 11 and a first illuminating means 21; at least a second testing means 20 comprising a second photographic means 12 and a second illumination means 22; an image processing means 30; a determination means 30; and a control means 50. The first illumination means 21 is set relative to the first photographic means 11 at an illumination angleα, and the second illumination means 22 is set relative to the second photographic means 12 at an illuminating angleβ, and at least either the illumination angleγor the illumination angleθis set to be within the range of 38-52 degrees. COPYRIGHT: (C)2007,JPO&INPIT
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